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Nitride based hard coatings are widely used for mechanical applications. Among these coatings, chromium nitrides are especially interesting because of its good mechanical and tribological properties. In this work we have studied the influence of nitrogen gas flow on mechanical and tribological properties of chromium nitride thin films. The chromium nitride thin films were deposited on Al 5083 by DC magnetron sputtering technique at different nitrogen gas flows in the range of 5-20 sccm. Surface morphology and chemical composition of the films were studied using field emission scanning electron microscope (FESEM). The thickness of the films was determined by quartz crystal monitor and checked with FESEM cross-section images. The mechanical and tribological properties of the samples were investigated by means of nanoindentation and scratch tests. The results showed that films hardness increased with nitrogen gas flow, while coefficient of friction and scratch volume decreased. The structural investigations showed that these behaviors were due to the decrease of dislocation density and improvement of crystal quality.

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