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Abstract-In this paper, a novel method of fabricating threedimensional (3-D) system-in-package (SiP) using a silicon carrier that can integrate known good dice with an integrated cooling solution is presented. The backbone of this stacked module is the fabrication of a silicon carrier with through-hole conductive interconnects. The design, process, and assembly to fabricate silicon through-hole interconnect using a wet silicon etching method is discussed in this paper. The process optimization to fabricate silicon carriers with solder through-hole interconnect within the design tolerance has been achieved. The design and modeling methodology to optimize the package in terms of electrical aspects of the stacked module is carried out to achieve less interconnect parasitics. An integrated cooling solution for 3-D stacked modules using single-phase and two-phase cooling solutions is also demonstrated for high-power applications. Known good thin flip-chip devices with daisy chain are fabricated and attached to the silicon carrier by flip-chip processes making it a known good carrier after electrical testing. Individual known good carriers are vertically integrated to form 3-D SiP.Index Terms-Three-dimensional system-in-package (3-D SiP), stacked modules, through wafer interconnection, wafer thinning, integrated cooling solution.

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In this paper, an integrated liquid cooling system for 3-D stacked modules with high dissipation level is proposed. The fluidic interconnects in this system are elaborated and the sealing technique for different fluid interfaces is discussed. Meanwhile, the pressure drop for each part of the system is analyzed. The optimized fluidic interconnects minimizing the pressure drop have been designed and fabricated, and the compact system is integrated. In line with the fluidic interconnect design and analysis, an experimental process for hydraulic characterization of the integrated cooling system is established. The pressure drops for different fluidic interconnects in this system are measured and compared with the analyzed results.

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