PZT thin films are deposited on SiO 2 /Si substrate by metallo-organic decomposition (MOD) process, using SrTiO 3 (STO) as buffer layer for textured growth. The STO layers deposited on SiO 2 /Si substrate by pulsed laser deposition process show (100)/(200) preferred orientation, whereas the STO buffer layer deposited on silica substrate using spin-coating technique show random orientation behavior. The use of STO as buffer layers enhanced the crystallization and the preferred orientations of the PZT films. The PZT on STO buffered SiO 2 /Si substrates thus obtained possess high refractive index, (n) PZT/STO = 2.1159, and are of good enough quality for optical waveguide applications.

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