This article is devoted to the investigation of multilayer diffraction grating of Al/GaAs using spectroscopic ellipsometry. The ellipsometric parameters y and D were measured under conditions of surface polariton excitation, as well. Various representations of the dielectric function for the analysis of optical data of Al films were examined. The representation using the Lorentzian oscillator approximation appears to be well-suited for this aim. The optical constants of thin Al films, obtained by the two methods, usual ellipsometry and polariton reflection spectroscopy, are compared. The measured optical constants were used to optimize the photodetector performance in the spectral range of interest.Stat#¾ posv¾ §ena issledovaniˇmnogoslojnyh diffrakcionnyh rexetok metodom spek-tral#noj +llipsometrii. *llipsometriqeskie parametry y i D takwe izmer¾lis# v us-lovi¾h vozbuwdeni¾ poverhnostnyh +lektromagnitnyh voln. Byli ispol#zovany ne-skol#ko sposobov opisani¾ di+lektriqeskoj funkcii dl¾ analiza optiqeskih svojstv Al plenok. Pokazano, qto metod Lorentcovskih oscill¾torov ¾vl¾ets¾ naibolee pod-hod¾ §im. Sopostavl¾ˇts¾ optiqeskie konstanty plenok Al, poluqennye dvum¾ metodami, obyqnoj ellipsometrii i pol¾ritonnoj spektroskopii otraweni¾. Izmerennye optiqeskie konstanty byli ispol#zovany dl¾ optimizacii parametrov fotodetektorov v issleduemoj oblasti spektra. 1 ) Fax: +38 044 265 8342;
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