In order to improve the power density of microactuators, recent research focuses on the applicability of fluidic actuation at the microscale. The main encountered difficulties in the development of small fluidic actuators are related to production tolerances and assembly requirements. In addition, these actuators tend to comprise highly three-dimensional parts, which are incompatible with traditional microproduction technologies. This paper presents accurate production and novel assembly techniques for the development of a hydraulic microactuator. Some of the presented techniques are widespread in precision mechanics, but have not yet been introduced in micromechanics. A prototype hydraulic microactuator with a bore of 1 mm and a length of 13 mm has been fabricated and tested. Measurements showed that this actuator is able to generate a force density of more than 0.23 N mm−2 and a work density of 0.18 mJ mm−3 at a driving pressure of 550 kPa, which is remarkable considering the small dimensions of the actuator.

No abstract

This paper presents the design, the realization and the modelling of an ortho-planar one-way microvalve that can be used in a micropump. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material. An analytical model of the spring deflection has been developed and tested, and results are compared to Finite Elements Modelling. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques, micro Electro Discharge Machining and stereo-lithography, and tested for a pressure up to 7 bars.

This paper presents the production and testing of an ortho-planar oneway micro-valve. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material, A previous paper presents and discusses a micro-valve assembly based on a spider spring. The present paper focuses on the valve assembly process and the valve performance.. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques (|LIEDM and stereo-lithography) and tested for pressures up to 7 bars.

No abstract