A new technique of high-resolution micro-Raman thermometry using anatase TiO2 microparticles (0.5-3 μm) is presented. These very high spatial resolution measurements (280 nm) reveal temperature gradients even within individual microparticles. Potential applications of this technique are demonstrated by probing the temperature distribution of a micro-fabricated heater consisting of a thin silicon nitride (Si-N) membrane with a gold coil on top of the membrane. Using TiO2 microparticle micro-Raman thermometry, the temperature from the outer edge of the coil to the inner portion was measured to increase by ~40 °C. These high spatial resolution microscopic measurements were also used to measure the temperature gradient within the 20 μm wide Si-N between the gold heating coils. 2D numerical simulations of the micro heater temperature distribution are in excellent agreement with the experimental measurements of the temperatures. These measurements illustrate the potential to extend applications of micro-Raman thermometry to obtain temperature details on a sub-micrometer spatial resolution by employing microparticles.

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A picosecond excimer laser–plasma source has been constructed, which generates an x-ray average power of 2.2 and 1.4 W at the wavelengths required for proximity x-ray lithography: 1.4 nm (steel target) and 1 nm (copper target), respectively. The plasma source could be scaled to the 50–75 W x-ray average power required for industrial lithographic production by scaling the total average power of the commercial excimer laser system up to 1 kW. The 1 nm x-ray source is used to micromachine a 2.5 THz microwave waveguide–cavity package with a 48 μm deep, three-dimensional structure, using the LIGA technique. The 1 nm x-ray source is also used to print 180 nm long transistor gates in the fabrication process of field-effect transistors.