A profitable mass production of Organic Light Emitting Diode (OLED) displays needs a new type of manufacturing equipment. We present the concept of a vertical In-Line machine equipped with linear etch and linear evaporation sources for organic materials(small molecules) and sputter as well as evaporation sources for metals and ITO.

We present the results of the first vertical In‐Line Organic Light Emitting Diode (OLED) manufacturing machine (VES 400) equipped with linear etch and linear evaporation sources for organic materials as well as metals. The deposition height of 400 mm and the deposition width of > 470 mm fit to generation 2 or even larger substrates.