27.3: New In‐Line Machine Concept for OLED Manufacturing

Hoffmann, Uwe; Netuschil, P.; Sauer, Peter W.; Lotz, Helmut; Klöppel, A.; Bender, Marcus; Trube, J.

doi:10.1889/1.1830926

Cited by 14 publications

(9 citation statements)

References 2 publications

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“…Together with Applied Materials (former Applied Films) at the Fraunhofer IPMS the first vertical In-Line machine for OLED manufacturing was established, named VES 400 [1]. The VES 400 is designed for a substrate height of 400 mm and a substrate width of 470 mm or even larger.…”

Section: Vertical In-line System For Lighting Applicationsmentioning

confidence: 99%

Integration of high-efficiency PIN organic light-emitting devices in lighting and optoelectronic applications

Amelung

Toerker

Tomita

et al. 2007

Light-Emitting Diodes: Research, Manufacturing, and Applications XI

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Displays based on organic light-emitting diodes (OLED) have rapidly developed and are commercially available since some time. However, in order to achieve large market penetration in new segments like lighting and optoelectronic, it is generally expected that the current status of the field has to advance in terms of manufacturing cost and integration possibilities. OLED devices with electrically doped transport layers show low operating voltage, high efficiency and long lifetime. In this paper we demonstrate that the concept of p- and n-type electrical doping can be applied under manufacturing conditions on the worldwide first vertical in-line fabrication setup for large area lighting applications. An in-linemanufactured highly efficient white-OLED-system will be presented. The driving of large area lighting tiles defines the resulting OLED lifetime and efficiency. In this paper we will present first results on the driving of large area lighting panels. Beside the lighting application the integration of highly efficient OLEDs for optoelectronic applications is an opportunity for innovative new applications. Microdisplays, integrated optocoupler and light barriers are few examples for the potential of OLEDs in optoelectronic applications. We will present results regarding the integration of highly efficient top-emitting PIN OLEDsTM for optoelectronic applications

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Section: Vertical In-line System For Lighting Applicationsmentioning

confidence: 99%

Integration of high-efficiency PIN organic light-emitting devices in lighting and optoelectronic applications

Amelung

Toerker

Tomita

et al. 2007

Light-Emitting Diodes: Research, Manufacturing, and Applications XI

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“…Organic light emitting diode (OLED) 1 has fast developed into an important technique of choice for many flat panel display applications. As volume production becomes necessary new manufacturing techniques are being developed with the goal to achieve uniform, high rate coating over large size panels [2][3][4] . Sumitomo Corporation and SVT Associates have jointly developed an evaporation source specifically designed to address the issue of cost effective and high yield OLED production.…”

Section: Objective and Backgroundmentioning

confidence: 99%

52.5L: Late‐News Paper: Versatile Evaporation Source for Large OLED Panel Manufacturing

Shibata

Klein

Hartmann

et al. 2003

Symp Digest of Tech Papers

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“…Most commonly, the thermal evaporation process utilizes the source of a point type in which a fixed crucible supplies the thin film material to the rotating substrate. Needless to say, much research has been already studied on the deposition process using the point source . While the point source has a simple structure and much research data accumulated, it requires a long source‐to‐substrate distance to maintain stable uniformity and this becomes unattractive as the substrate size is increased.…”

Section: Introductionmentioning

confidence: 99%

“…Needless to say, much research has been already studied on the deposition process using the point source. 1,3,4 While the point source has a simple structure and much research data accumulated, it requires a long source-to-substrate distance to maintain stable uniformity and this becomes unattractive as the substrate size is increased. Consequently, the process using the point source has reduced fraction of material that deposits on the substrate and accompanies an expansion of a vacuum chamber, that is a decrease of the process efficiency.…”

Section: Introductionmentioning

confidence: 99%

Simulation of thin film thickness distribution for thermal evaporation process using a scanning linear source

Kim

Pahk

2017

Jnl Soc Info Display

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Thermal evaporation process is the main process involved in the production of OLED displays and with the trends toward larger substrate size and display resolution, film thickness uniformity must be carefully controlled in order to implement exact pixel data. To secure stable film thickness uniformity on the substrate area, thin films are deposited on large‐area glass substrates via thermal evaporation process using a linear source. We designed a linear source and mathematical model was developed to describe the system with a focus on the linear source. Then, system parameters were determined to guarantee uniform thickness using computer‐based simulation, replacing wasteful actual experiments, followed by carrying out experiments based on the determined parameters. After the deposition process, data from the mathematical model and experiments was compared and the resulting agreement was good, verifying the validity of the proposed method. Consequently, by applying the proposed method, display manufacturing process related to thermal evaporation can be controlled within a tight tolerance in order to maximize the production yield rate.

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27.3: New In‐Line Machine Concept for OLED Manufacturing

Cited by 14 publications

References 2 publications

Integration of high-efficiency PIN organic light-emitting devices in lighting and optoelectronic applications

Integration of high-efficiency PIN organic light-emitting devices in lighting and optoelectronic applications

52.5L: Late‐News Paper: Versatile Evaporation Source for Large OLED Panel Manufacturing

Simulation of thin film thickness distribution for thermal evaporation process using a scanning linear source

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