The MnO-Zn thin films were fabricated by radio frequency (RF) magnetron sputtering and compared with pulse electrodeposition (PED) Zn thin films, doped with MnO and ZrO nanoparticles. Surface morphology, structural properties, chemical composition and corrosion resistance of these coatings were investigated by using scanning electron microscopy, X-ray diffraction (XRD), energy-dispersive X-ray spectroscopy, 3-D scanning interferometry and environmental chamber. Surface morphology and degree of crystallinity have different behaviours for different deposition methods. Pulse-coated films have polycrystalline structure with high surface roughness (R a ), whereas sputtered films are monocrystalline with reduced roughness (R a ). Corrosion tests of both RF sputter and PED films revealed that the distribution of corrosion products formed on the surface of sputter films were not severe in extent as in case of electrodeposited coatings. Results showed that the doping of ZrO nano-sized particles in Zn matrix and Mn-Zn composite films significantly improved the corrosion resistance of PED thin films. High electron mobility [7] and room temperature electrical conductivity of ZnO thin films make it perfect material for electronics equipment. Additional advantages of ZnO thin films and micro-nanostructure are abundance and non-toxicity of the ZnO material, low cast and quantum size effect. Depending on the application, tuning properties and band gap of ZnO is possible by doping another material such as: aluminum (Al), gallium (Ga), magnesium (Mg) and manganese (Mn).Also, there are advanced techniques of growing ZnO thin films and manufacturing such as metal organic chemical vapor deposition [8], radio frequency (RF) magnetron sputtering [9], sol-gel method and pulsed laser deposition [10]. Properties of ZnO thin films are investigated by using molecular beam epitaxy [11].Zinc plating is extensively used in corrosion protection of steel in many structural and general engineering applications. Zn coating on steel substrate provides with physical and mechanical properties as well as good corrosion resistance [12]. However, a high dissolution rate and low corrosion resistance limit the use of Zn coatings. In recent research and development activity on zinc-based alloy coatings, there is a growing interest in the use of Zn with various alloying elements like Mn and Zr. These elements (Mn and Zr) have an electrically, more negative potential (E°M n

The ZnMnO thin films were deposited on glass substrates by radio frequency magnetron sputter ing method. The properties of ZnMnO thin films were investigated by high resolution x ray diffractometer (HRXRD),atomic force microscopy (AFM), UV-Vis spectrometer and room temperature photolumines cence (PL), under the influence of substrate temperature. The substrate temperature was varied from 300, 400 and 500°C. With increasing the substrate temperature, the structure of the films changed from cubic to hex agonal. The cubic ZnMnO thin films grown along [210] direction, while the hexagonal ones grown along [002] direction. The changes in surface morphology provided a proof on the structural transition. Also, decrease and increase of optical band gap is associated with cubic or hexagonal structure of the films.