IntroductionWith each semiconductor process node, the impacts on performance of environmental and semiconductor process variations become a larger portion of the cycle time of the product. Simple guard-banding for these effects leads to increased product development times and uncompetitive products. In addition, traditional static timing methodologies are unable to cope with the large number of permutations of process, voltage, and temperature corners created by these independent sources of variation. In this paper we will discuss the sources of variation; by introducing the concepts of systematic inter-die variation, systematic intra -die variation, and intra-die random variation. We will show that by treating these forms of variations differently, we can achieve design closure with less guard-banding than traditional methods.ASIC providers are typically responsible for the performance and yield of the devices they deliver. It is therefore common in the ASIC industry to require timing closure, as measured by a static timing analysis tool, at fast process and slow process timing corners. These corners are supposed to represent the maximum variation that is possible between any two die due to normal manufacturing tolerances. The definition of these fast and slow corners is usually done by moving all of the relevant process parameters (eg. channel length, threshold voltage, etc.) to some statistical limit and developing timing models with these process assumptions. It is also now common for ASIC providers to require timing sign-off assuming some amount of on-chip variation. This additional conservatism is added to account for the intra-die variations which can result in missed timings due to differential process variation (and therefore delays) on the clock and data paths. Environmental condition variations, such as end user voltage and temperature, are also accounted for by running additional static timing corners. In the recent past, these methods were sufficient to guarantee timing, and therefore yield, across the range of the normal manufacturing process window.With continued scaling of CMOS technology however, the numbers of relevant sources of variation and their magnitude have increased. In an attempt to account for this , additional static timing corners are being added to ASIC design flows to account for sources of variation that were previously ignored, such as mismatch between PFET on-current and NFET on-current due to threshold voltage variation.As additional sources of variation become important, either the total guard-band applied during static timing is increased, or the risk of impacting yield is increased. This comes about due to the different delay sensitivities of each path on a design and the inability of the currently available design automation tools to handle the unique sensitivities of each path on the chip without running 2 n timing corners, where n is the number of independent variables of interest. Some paths are predominately sensitive to metal delay while others are predominately sensi...
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