We presented an alternative design of type II superlattice photodiodes with the insertion of a mid-wavelength infrared M-structure AlSb∕GaSb∕InAs∕GaSb∕AlSb superlattice for the reduction of dark current. The M-structure superlattice has a larger carrier effective mass and a greater band discontinuity as compared to the standard type II superlattices at the valence band. It acts as an effective medium that weakens the diffusion and tunneling transport at the depletion region. As a result, a 10.5μm cutoff type II superlattice with 500nm M-superlattice barrier exhibited a R0A of 200Ωcm2 at 77K, approximately one order of magnitude higher than the design without the barrier. The quantum efficiency of such structures does not show dependence on either barrier thickness or applied bias.
The utilization of the P+-π-M-N+ photodiode architecture in conjunction with a thick active region can significantly improve long wavelength infrared type-II InAs/GaSb superlattice photodiodes. By studying the effect of the depletion region placement on the quantum efficiency in a thick structure, we achieved a topside illuminated quantum efficiency of 50% for an N-on-P diode at 8.0 μm at 77 K. Both the double heterostructure design and the application of polyimide passivation greatly reduce the surface leakage, giving an R0A of 416 Ω cm2 for a 1% cutoff wavelength of 10.52 μm, a Shot–Johnson detectivity of 8.1×1011 cmHz/W at 77 K, and a background limited operating temperature of 110 K with 300 K background.
Effective surface passivation of type-II InAs∕GaSb superlattice photodiodes with cutoff wavelengths in the long-wavelength infrared is presented. A stable passivation layer, the electrical properties of which do not change as a function of the ambient environment nor time, has been prepared by a solvent-based surface preparation, vacuum desorption, and the application of an insulating polyimide layer. Passivated photodiodes, with dimensions ranging from 400×400to25×25μm2, with a cutoff wavelength of ∼11μm, exhibited near bulk-limited R0A values of ∼12Ωcm2, surface resistivities in excess of 104Ωcm, and very uniform current-voltage behavior at 77K.
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