In this paper, we introduced nanocomposite materials as a debonding layer (DBL) in the fabrication of flexible displays. These materials provided flexible substrate with good debonding capability even after 450 o C low-temperature poly-silicon (LTPS) process. The effect of temperature on debonding force of flexible substrate was investigated. Besides, some characteristics of thin-film transistors (TFT) were also studied.
Flexible AMOLED display has received great attention in recent years. In this paper, we provided a method of fabricating flexible AMOLED display by using a nanocomposite material as a debonding layer (DBL). This material provided flexible substrate with good debonding capability even after 450 o C lowtemperature poly-silicon (LTPS) process. After array and OLED process, the panels were released by the mechanical roller debondor(MRD). The effect of temperature on debonding force of flexible substrate was investigated. Besides, electrical characteristics of thin-film transistors (TFT) and pitch variationafter separation were also studied. Finally, the fixed curvature of Flexible AMOLED display was showed.
Coat-debond technology using two kinds of debonding layers (DBL), with or without metal sub-layer, was applied to 450 LTPS process. It was shown that the technology had multiadvantages and suitable for mass production of flexible display.
Author Keywordsflexible display debonding layer (DBL) thermal conductive EMI; LTPS.
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