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In this paper we present an approach for predicting polishing rate with the main parameters in the recipe. Compared with Preston's equation, a dimensional analysis-based equation, RR ϭ A ϫ (DF/BP) 1/2 ϫ (TR/TT) b ϫ TT, was given. We used a method called ''dimensional analysis'' to deduce an empirical equation. We successfully correlated the polishing rate with the operational parameters, such as the turntable rotational speed, the top-ring rotational speed, downforce, and back-side pressure. For the convenience of chemical mechanical polishing ͑CMP͒ process engineers, we proposed a simple method to help predict the polishing rate. With the experimental data, the presented equation seems workable.