A uniform diamond nanocone array was formed by plasma etching of diamond film in a hot filament chemical vapor deposition (HFCVD) system. A surface amorphous carbon coating layer, which is formed during CH4/H2 plasma-etching process, was removed by Ar plasma in a reactive ion etching system. The hydrogenation of diamond nanocones was performed in H2 ambience by using the same HFCVD system. The air-diluted NH3 and NO2 gases sensing properties of the diamond cone arrays had been studied by using electric current versus measurement time characteristics at room temperature. The repeatable chemical sensing properties of the hydrogenated diamond cone array sensor are enhanced, in comparison with as-formed diamond film. Surface two-dimensional hole gas structure and greatly increased surface-to-volume ratio both play a key role for the excellent detection performance. As-formed diamond nanocone arrays show a promising prospect for applications as chemical sensor for both reducing (NH3) and oxidizing (NO2) gases.

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