This paper presents the findings of a design, modeling, and fabrication study of ZnO and PbZr 0 3 Ti 0 7 O 3 thin-film bulk acoustic resonators and filters. Measurements of the high-frequency responses of ZnO resonators having different area are used to develop an acoustic model that accurately represents resonator impedance data. The models are also used to interpret-parameter measurements on thin-film PbZr 0 3 Ti 0 7 O 3-based resonators and a value for the effective coupling coefficient deduced. ZnO and PbZr 0 3 Ti 0 7 O 3 ladder filters were designed based on measured impedance data from single resonators. Ladder filters based on PbZr 0 3 Ti 0 7 O 3 have been fabricated for the first time. It is shown that the high coupling coefficient in PbZr 0 3 Ti 0 7 O 3 leads to bandwidths in the range 100 120 MHz at a center frequency of 1.6 GHz, larger than the bandwidths of ZnO-based filters.

We measured the electrical impedances of 22 sandstone samples during oil‐driving‐water tests using the two‐electrode method. Experiments show that the imaginary part X of the impedance (R + iX) of rock may respond well to water saturation in the frequency range 100 Hz–15 MHz. We found that the maximum −X values and their corresponding interfacial polarization frequencies are linear with water saturation. The lower critical frequency is found to vary with water saturation, in an unclear relationship with the characteristic length of rock. The dissipation factor at the interfacial polarization frequency remains quite stable and may be an indicator of the pore structure of rock. We used an equivalent circuit to explain the dispersive behavior of rock. More than one interfacial polarization frequency in the impedance Argand plot is predicted and can be observed if the measurement frequency range is wide enough.

Thin Film Bulk Acoustic Wave Resonators (FBAR) using Lead Zirconate Titanate (PZT) thin films as the piezoelectric active layer will be favourable for voltage controlled oscillators and wide band filter due to the large electro-mechanical coupling coefficient of PZT. This paper reports the fabrication process and results of PZT FBARs and filters. The temperature coefficient and bias voltage effect are also presented.