Articles you may be interested inSynthesis and characterization of an organogermanium resist: Poly(trimethylgermylmethyl methacrylate-co-chloromethylstyrene) J. Vac. Sci. Technol. B 7, 1723 (1989 10.1116/1.584446 Nanometer lithography for III-V semiconductor wires using chloromethylated poly-α-methylstyrene resist Molecular parameters and lithographic performance of poly(glycidyl methacrylate-co-ethyl acrylate): A negative electron resistThe lithographic performance of the resist system poly(p-methylstyrene-co-chloromethylstyrene) PMS-CMS has been assessed. Copolymerization of the monomers, PMS and CMS, produced resists with CMS increasing from 0% to 52%, molecular weights between 122000 and 167000, and dispersivities between 1.7 and 2.3. The sensitivity (D~·S) and contrast of pure PMS for 20 kV electrons was 38 pC cm-2 and 2.8, respectively. Addition of 4.2% CMS increased the sensitivity to 2.1 pC cm -2 but only reduced the contrast to 2.3, a value sufficient for submicron resolution. Further increases in CMS content, to 52%, produced smooth variations in sensitivity and contrastto 1.2 pC cm -2 and 1.5, respectively. Exposure of 4.5% CMS resist with deep UV light (22 mJ cm-2 ) produced 1 pm lines and spaces with vertical profiles. The etch rate of this resist, during poly-Si definition in a chlorine plasma, was almost half that ~f the photoresist HPR206.r
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.