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A miniaturized nebulizer chip for vaporization of liquid samples for mass spectrometry has been designed, fabricated, and characterized for fluidic and thermal performance. Silicon/glass chip has a liquid sample channel placed centrally between symmetric nebulizer gas channels. The liquid sample is nebulized and vaporised by an integrated platinum heater. The vaporized sample exits through an etched nozzle, and is ionized by an external corona needle. The ions are analysed by a mass spectrometer. The chip has been fabricated in both anisotropically wet etched and DRIE versions in silicon, with an anodically bonded Pyrex glass cover plate. Three different fluidic inlet designs are presented, with both through-wafer and edge insert versions. The shape of the erupting gas jet has been visualized by infrared thermography by using a low-diffusivity imaging screen and high heat capacity helium as a test gas. Dimensions of the jet's thermal footprint on the screen show that the jet is very narrow and confined, and this is confirmed in mass spectrometry results. This confined jet supplies the sample to the ionization region near corona tip, enabling efficient use of very small sample amounts and submicroliter flows.[1591]

This work presents experimental [infrared (IR) thermography] and computational (finite element model) results of temperature distributions of an electrokinetic separation chip. Thermal characteristics of both the electrolyte solution and the polymer chip (SU-8) are taken into account in modeling temperature distributions during electrokinetic flow. Multiphysics and multiscale simulation couples electrostatics, heat transfer, and fluid dynamics. The accompanying IR thermography is a non-contact method, which can measure fractional temperature differences with sub-second time resolution. Any structures or temperature marker molecules interfering with the experiment are not needed. Nominal spot size in the IR measurements is 30 lm with a field of view of several millimeters enabling both local and chip-scale temperature monitoring simultaneously. As a result, we present a computer model for electrokinetic chips, which enables simulation of fractional temperature changes during electrophoresis under real operating conditions. The accuracy of the model is within ±1°C when the deviation in electrochemical processes is taken into account. The simulation results also suggest that the temperature on the chip surface qualitatively reflects the temperature inside the microchannel with an average offset of 1-2°C.

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Neural network applications to ultrasonic nondestructive evaluation.