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A vertically stacked directional coupler incorporating electro-optic poled polymer was fabricated by spin coating, photolithography, and reactive ion etching processes, based on the fabrication technique used for polymeric single-mode channel waveguides. Vertically coupled operation at 1.3 μm have been achieved between two stacked channels which were kept 3.5–5 μm apart by a narrow cladding layer. The intensity modulation has been clearly demonstrated in the coupler with electrodes when a voltage is applied at 10 kHz between them.

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Two types of low-loss polymeric optical waveguide with 45° mirrors, which accomplish 90° out-of-plane optical deflection into or from their substrate, were fabricated by cutting the waveguides with a 90° V-shaped or a 45° wedge-shaped diamond blade. The excess losses caused by the mirrors were less than 0.3 dB at 0.83 µm, which showed that the mirror surfaces were very smooth.