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The author would like to acknowledge Nanyang Technological University and School of Materials Science and Engineering for the opportunity to pursue her degree. The author would like to acknowledge GLOBALFOUNDRIES Pte Ltd for the funding of her studies, as well as providing all the necessary samples vital to the completion of the study.

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In this paper, small area test structures were used to study the effect of field interaction between neighboring fingers of the test structures. Time dependent dielectric breakdown tests were performed on the test structures. It was determined that the electric field between adjacent fingers, and not only the electric field between the cathode and anode, has an impact on the breakdown lifetime of the low-k dielectric.

No abstract