A primary-level comparator, with a reproducibility of 0.2 nm and intended for realization of a Systeme International length unit in the range of 1-100 mm, is reported. High-precision differential measurements of phase change on reflection from blocks and end plates are demonstrated. A set of experiments has been developed to measure systematic error associated with nonideal interferometer optics and deviations from flatness of an auxiliary plate. For specially selected high-grade 6-mm blocks, reproducible wringing has been achieved with a random uncertainty in length measurements of 0.1-0.2 nm. Subnanometer wear-off of the blocks as a result of the cleaning has been detected. Under the conditions of reproducible wringing, the accuracy of the length measurements is evaluated to be in the 2-3-nm range for 6-mm blocks.

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Abstract. In recent years absolute interference microscope was created at National Metrology Institute of Brazil (INMETRO). The instrument by principle of operation is imaging phaseshifting interferometer (PSI) equipped with two stabilized lasers of different colour as traceable reference wavelength sources. We report here some progress in development of the software for this instrument. The status of undergoing internal validation and verification of the software is also reported. In contrast with standard PSI method, different methodology of phase evaluation is applied. Therefore, instrument specific procedures for software validation and verification are adapted and discussed.