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For a micro-Computed Tomography (Micro-CT) system, the microfocus X-ray tube is an essential component because the spatial resolution of CT images, in theory, is mainly determined by the size and stability of the X-ray focal spot of the microfocus X-ray tube. However, many factors, including voltage fluctuations, mechanical vibrations, and temperature changes, can cause the size and the stability of the X-ray focal spot to degrade. A new microfocus X-ray tube based on a point-like micro-target in which the X-ray target is irradiated with an unfocused electron beam was investigated. EGS4 Monte Carlo simulation code was employed for the calculation of the X-ray intensity produced from the point-like micro-target and the substrate. The effects of several arrangements of the target material, target and beam size were studied. The simulation results demonstrated that if the intensity of X-rays generated at the point-like target is greater than half of the X-ray intensity produced on the substrate, the X-ray focal spot is determined in part by the point-like target rather than by the electron beam in the conventional X-ray tube. In theory, since it is able to reduce those unfavorable effects such as the electron beam trajectory swinging and the beam size changing for the microfocus X-ray tube, it could alleviate CT image artifacts caused by the X-ray focal spot shift and size change.

Due to X-ray attenuation being approximately proportional to material density, it is possible to measure the inner density through Industrial Computed Tomography (ICT) images accurately. In practice, however, a number of factors including the non-linear effects of beam hardening and diffuse scattered radiation complicate the quantitative measurement of density variations in materials. This paper is based on the linearization method of beam hardening correction, and uses polynomial fitting coefficient which is obtained by the curvature of iron polychromatic beam data to fit other materials. Through theoretical deduction, the paper proves that the density measure error is less than 2% if using pre-filters to make the spectrum of linear accelerator range mainly 0.3 MeV to 3 MeV. Experiment had been set up at an ICT system with a 9 MeV electron linear accelerator. The result is satisfactory. This technique makes the beam hardening correction easy and simple, and it is valuable for measuring the ICT density and making use of the CT images to recognize materials.

A full vacuum-sealed macrofocus x-ray tube with a vertically-aligned ring-shaped carbon nanotube (CNT) emitter grown by microwave plasma enhanced chemical vapor deposition is presented in this paper. The external grid allowed the CNT-based x-ray tube to exhibit transient switching on and off. The total emission current was 200 μA, which corresponds to a maximum emission current density of 10.1 A/cm2 from the ring-shaped CNT emitter when the grid voltage was 2.4 kV. The optimized focus electrode controlled the beam convergence on the target to produce a very small x-ray focal spot size less than 5 μm. Consequently, this microfocus x-ray tube could produce x-ray images with very high spatial resolution. X-ray fluoroscopy images of a multilayer printed circuit board (PCB) and field programmable gate array show distinct gold PCB traces with approximately 20 μm width.

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