Cooling the vibration amplitude of a microcantilever as low as possible is important to improve the sensitivity and resolutions of various types of scanning type microscopes and sensors making use of it. When the vibration amplitude is controlled to be smaller using a feed back control system, it is known that the obtainable minimum amplitude of the vibration is limited by the floor noise level of the detection system. In this study, we demonstrated that the amplitude of the thermal vibration of a microcantilever was suppressed to be about 0.15 pmHz−1/2, which is the same value with the floor noise level, without the assistance of external cryogenic cooling. We think that one of the reason why we could reach the smaller amplitude at room temperature is due to stiffer spring constant of the lever, which leads to higher natural frequency and consequently lower floor noise level. The other reason is considered to be due to the increase in the laser power for the diagnostics, which lead to the decrease in the signal to noise ratio determined by the optical shot noise.

Recently, there have been various attempts to dampen the vibration amplitude of the Brownian motion of a microresonator below the thermal vibration amplitude, with the goal of reaching the quantum ground vibration level. To further develop the approach of reaching the quantum ground state, it is essential to clarify whether or not coupling exists between the different vibration modes of the resonator. In this paper, the mode-selective control of thermal Brownian vibration is shown. The first and the second vibration modes of a micro-cantilever moved by a random Brownian motion are cooled selectively and independently below the thermal vibration amplitude, as determined by the statistical thermodynamic theory, using a mechanical feedback control method. This experimental result shows that the thermal no-equilibrium condition was generated by mechanical feedback control.