Feedback damping of a microcantilever at room temperature to the minimum vibration amplitude limited by the noise level

Kawamura, Yoshiyuki; Kanegae, Riki

doi:10.1038/srep27843

Cited by 5 publications

(3 citation statements)

References 25 publications

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“…The quality factor Q of the resonance was measured to be around 7000. When also measured for the same silicon cantilever without gold coating, the Q value was up around 1.0 × 10 5 12 , which means that the gold coating increased the damping factor and decreased Q .…”

Section: Methodsmentioning

confidence: 89%

“…The output signal of the interferometer was passed through a band-pass filter with a bandwidth of 13 kHz. The signal phase was delayed by 90° to dampen the vibration amplitude 12 . The loop gain g of the feedback control was changed by altering the amplification ratio of the drive voltage of the PZT.…”

Section: Methodsmentioning

confidence: 99%

“…The theoretical thermal vibration amplitude was calculated to be 4.5 × 10 −11 m (45 pm), assuming that the energy k B T/ 2 is distributed as an average potential energy; here, k B is Boltzmann’s constant, and T the ambient temperature (300 K) 12 .…”

Section: Methodsmentioning

confidence: 99%

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Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

Kawamura

2019

Sci Rep

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This study describes a new two-step process to cool the thermal vibration of microcantilevers. The process combines active mechanical feedback cooling and optical cavity cooling. A micro-Fabry–Perot interferometer, built in-house, is set atop a microcantilever to measure the vibration amplitude, the high optical power density of which induces cavity cooling in the optical cavity. Using a two-step cooling procedure, the equivalent temperature of the thermal vibration of a microcantilever is lowered from room temperature to the theoretical cooling limit of 0.063 K, a much lower temperature than that achieved via simple cavity cooling (18 K), and then by mechanical feedback cooling (0.135 K) obtained for the same type of microcantilevers in previous studies. This experimental demonstration showcases a new type of cooling process of the amplitude of thermal vibration for micro-mechanical resonators to a lower temperature and does not need additional cooling using a conventional cryogenic refrigerator.

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Section: Methodsmentioning

confidence: 89%

Section: Methodsmentioning

confidence: 99%

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Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

Kawamura

2019

Sci Rep

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The first distributed-mass high-performance programmable optoelectromechanical steerable motion-wave sensors focused on sophisticated biomedical applications

Hussein

2023

SN Appl. Sci.

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This paper introduces the first high-performance distributed-mass acoustic sensor made of cascaded differential phase shift suspended slot waveguide sections in a Mach–Zehnder interferometer optical transducer circuit. The heavyweight seismic mass used in traditional optoelectromechanical sensors is replaced by an fg lightweight coupling arm yielding an extra compact fast responding structure enabling utilizing over $$64$$ 64 cascaded sections and resulting in enhancing the performance by hundreds of times. The transducer operation relies on converting the acoustic vibration into phase modulation of the light for a splendid performance. The novel sensor architecture challenges achieving optical sensitivities higher than $$33\times {10}^{3} \%/\mathrm{g}$$ 33 × 10 3 % / g (33 times supersensitive), operating at ultrasonic acoustic speeds higher than 27 MHz, and recognizing resolutions in the 1 ng order. The programmable sensor is voltage-controlled supporting the operation in multimodes. Four operation modes are elucidated including the natural aspiration force, turbo electrostatic force open-loop voltage control, zero-force closed-loop voltage control, and dynamic turbo-force closed-loop voltage control. Wide dynamic ranges for controlling the optical sensitivity and maximum measurable acceleration up to 115.5 dB are reported. Steering capabilities of the acoustic beam in the azimuth plane are demonstrated utilizing two-spoke and three-spoke directional architectures supporting $$116.64^\circ$$ 116 . 64 ∘ and $$360^\circ$$ 360 ∘ of respective steering angles. Potential acoustic biosignal-based applications in the medical field are outlined.

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Micro Fabry-Pérot Interferometer at Rayleigh Range

Tsujiie

Kawamura

2018

Sci Rep

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The Fabry-Pérot interferometer is used in a variety of high-precision optical interferometry applications, such as gravitational wave detection. It is also used in various types of laser resonators to act as a narrow band filter. In addition, ultra-compact Fabry-Pérot interferometers are used in the optical resonators of semiconductor lasers and fiber-optic systems. In this work, we developed a micro-scale Fabry-Pérot interferometer that was constructed within the Rayleigh range of the optical focusing system. The high precision that is conventionally required for the optical parallelism and the surface accuracy of the mirrors was not so critical for this type of Fabry-Pérot interferometer. The interferometer was constructed using a gold-coated silicon microcantilever with reflectivity of 92% and a dielectric multilayer flat mirror with reflectivity of 85%. The focal spot size of the laser beam is 20 μm and the cavity length is approximately 20 μm. The finesse was measured to be approximately 25. The interferometric characteristics of the device were consistent with the theoretically calculated performance. The developed micro Fabry-Pérot interferometer has the potential to make a marked contribution to advances in optical measurements in various micro sensing system.

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Feedback damping of a microcantilever at room temperature to the minimum vibration amplitude limited by the noise level

Cited by 5 publications

References 25 publications

Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

Mechanical feedback cooling assisted by optical cavity cooling of the thermal vibration of a microcantilever

The first distributed-mass high-performance programmable optoelectromechanical steerable motion-wave sensors focused on sophisticated biomedical applications

Micro Fabry-Pérot Interferometer at Rayleigh Range

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