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Several samples of a-Si02/c-Si(100) with different oxide layer rhicknesses and different silicon surface qualities were examined by x-ray diffraction. The layer thickness as well as the surface roughness and the interface roughness were studied by measuring the reflectivity of the samples near total external reflection. A separate and detailed determination of the interface roughness is obtained by analysing the intensity near the Si(400) reciprocal lattice point. There is a pronounced diffuse scattering parallel to the normal of the interface, the frequently called crystal truncation rods. Both the reflectivity and the isointensitycontours around the (400) reflection demonstrate the presence of an intermediate layer between a-Si02 and c-Si in a crystalline state.

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