Thermal desorption spectroscopy (TDS) was used to study the thermal desorption kinetics of zirconium hydride films, which were deposited on molybdenum substrates and thermally charged with gas phase hydrogen. The observed desorption peaks were attributed to phase transforming steps. The activation energy and pre-exponential factor for desorption kinetics was estimated as 116 kJ/mol and 8762 s−1 according to Kissinger relation, respectively. A simulation of TDS spectra was made, which showed that the desorption process followed a first order kinetics. The kinetic parameters were then utilized to predict weight loss behavior at a temperature profile. Pressure effects that can potentially reduce the desorption rate were discussed.

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