An electron-cyclotron resonance plasma source that generates 500 mm wide plasma has been developed. The plasma is generated by a 2.45 GHz traveling microwave which is supplied through a long slot antenna prepared in the waveguide in a divergent magnetic field generated by permanent magnets and a solenoid coil. Diamondlike carbon (DLC) films were deposited in a wide zone 320 mm in width. The breakdown field was 8.4×106 V/cm and permittivity, 3.89. The prepared Al/DLC/Si metal/insulator/semiconductor diode revealed fairly good field effect in its capacitance–voltage curve.

In this paper we describe an improved super-wide electron cyclotron resonance (ECR) plasma source which consists of permanent magnets, a solenoid coil and an independently excited double-slot antenna. Each slot antenna is prepared in the side wall of the rectangular waveguide positioned so that the two slot antennas are parallel and shifted by the distance of λ g/4 (λ g: waveguide wavelength) from each other. An 800-mm-wide (one-dimensional distributed) plasma of oxygen gas is produced, and an ion current density uniformity within ±5% over 770 mm in length can be obtained.

An electron cyclotron resonance (ECR) plasma source which generates 500-mm-wide plasma has been developed. A divergent magnetic field sufficient for ECR is generated by permanent magnets and a solenoid coil. A 2.45-GHz traveling microwave is supplied through a long slot antenna prepared in the sidewall of the waveguide and excites ECR plasma. This apparatus is applied to the diamondlike carbon (DLC) films deposition and DLC films were deposited in a wide zone 320 mm in width.