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The process of cadmium zinc telluride (CZT) surface passivation is very important to reduce the leakage current of the detector and to improve the detector performance. NH 4 H 2 O 2 solution was identified as an effective passivation agent for CZT. We fabricated a CZT planar detector and measured the detector performances before and after the NH 4 H 2 O 2 passivation. For the first time, the passivation effect on CZT-metal contact was measured. The depth profile of the chemical composition of metal contact was measured with AES to understand the change of the CZT detector performance with passivation.Index Terms-Cadmium zinc telluride (CZT), leakage current, metal-semiconductor contact, surface passivation.

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