We report the design, fabrication and experimental investigation of a spectrally wide-band terahertz spatial light modulator (THz-SLM) based on an array of 768 actuatable mirrors with each having a length of 220 μm and a width of 100 μm. A mirror length of several hundred micrometers is required to reduce diffraction from individual mirrors at terahertz frequencies and to increase the pixel-to-pixel modulation contrast of the THz-SLM. By means of spatially selective actuation, we used the mirror array as reconfigurable grating to spatially modulate terahertz waves in a frequency range from 0.97 THz to 2.28 THz. Over the entire frequency band, the modulation contrast was higher than 50% with a peak modulation contrast of 87% at 1.38 THz. For spatial light modulation, almost arbitrary spatial pixel sizes can be realized by grouping of mirrors that are collectively switched as a pixel. For fabrication of the actuatable mirrors, we exploited the intrinsic residual stress in chrome-copper-chrome multi-layers that forces the mirrors into an upstanding position at an inclination angle of 35°. By applying a bias voltage of 37 V, the mirrors were pulled down to the substrate. By hysteretic switching, we were able to spatially modulate terahertz radiation at arbitrary pixel modulation patterns.

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The integration of chemo-responsive hydrogels into fragile microelectromechanical systems (MEMS) with reflective surfaces in the micron to submicron range is presented. Direct laser writing (DLW) for 3D microstructuring of chemoresponsive “smart” hydrogels on sensitive microstructures is demonstrated and discussed in detail, by production of thin hydrogel layers and discs with a controllable lateral size of 2 to 5 µm and a thickness of some hundred nm. Screening results of polymerizing laser settings for precision microstructuring were determined by controlling crosslinking and limiting active chain diffusion during polymerization with macromers. Macromers are linear polymers with a tunable amount of multifunctional crosslinker moieties, giving access to a broad range of different responsive hydrogels. To demonstrate integration into fragile MEMS, the gel was deposited by DLW onto a resonator with a 200 nm thick sensing plate with high precision. To demonstrate the applicability for sensors, proof of concept measurements were performed. The polymer composition was optimized to produce thin reproducible layers and the feasibility of 3D structures with the same approach is demonstrated.