Brownian motion of a tunable vertical-cavity surfaceemitting lasers (VCSELs) movable microelectromechanical systems (MEMS) mirror is shown to broaden the spectral width of the laser emission line. A low-noise wavelength feedback system is presented and evaluated. This feedback system is employed to reduce measured linewidth from 1050 to 400 MHz fullwidth at half-maximum (FWHM), an improvement of 62%. The effects of device design parameters on closed-loop Brownian motion levels are analyzed. The potential increases in performance resulting from vacuum packaging and advanced controller design are discussed.[1167]Index Terms-Brownian noise, laser noise, microelectromechanical systems (MEMS), surface-emitting lasers.

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We demonstrate novel electrically driven 1330 and 1550 nm VCSELs using conventional InGaAsP active regions. The VCSELs employ two TiO2/SiO2 DBR mirrors and an InAlAs tunnel junction that converts electrons to holes, minimizing free carrier losses in the p-type material. The active layers are transferred onto Si wafers using wafer-scale Pd silicide bonding. We have obtained single-mode room-temperature output powers as high as 2.4mW at 1330nm and 2.7mW at 1550nm. At 80C we have obtained 0.6mW of single-mode power at 1330nm and over 1 mW at 1550nm.These are the highest power single-mode InP-based VCSELs reported in these wavelength ranges.