Based on the finite element (FE) simulations done in this work, lowering the bonding temperature significantly decreases the bonding induced residual stresses. Therefore, low temperature Cu-Sn-In SLID process was utilized to bond Si to Si and Si to sapphire under various bonding conditions. The microstructural evolution and the (thermo-) mechanical properties of the joints were studied. The results showed that the Cu-Sn-In SLID bonds composed of a single Cu6(Sn,In)5 IMC phase with high joint strength. Furthermore, the hardness and Young's modulus of Cu6(Sn,In)5 formed in the SLID bonding were measured to be slightly higher than that of binary Cu6Sn5.

No abstract