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Antiferroelectric lead zirconate titanate (PZT) thin films have been prepared by chemical solution deposition using oxide powders. The films were processed onto steel substrates coated with a conducting oxide layer of LaSrMnO3. Homogeneous and uniform films up to 3.4 μm thick and with polarization saturation values up to 35 μC/cm2 have been obtained. The compositional transition from the ferroelectric to the antiferroelectric phase at the high zirconium side of the PZT phase diagram was studied by x-ray diffraction and hysteresis loop measurements as a function of the Zr/Ti ratio. Film thickness and annealing temperature dependencies are reported.

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