The density and viscosity of a solution of potassium zincate in aqueous KOH has been measured for various concentrations of zincate and KOH. The viscosity was measured at room temperature and the density from room temperature to 60°C. The data were tabulated and fitted by multiple regression.

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Characterization of an aluminum etching process in an inductively coupled discharge using measurements of discharge impedance and current and voltage sensors The effects of process conditions and chamber geometry on the uniformity of Al etched by Cl 2 were measured in a Lam TCP™ 9600 SE etch reactor. A computer simulation accurately predicted etch uniformity and aided in the explanation of uniformity trends. Parameters used in the experimental matrix included pressures between 6 and 24 mT, flow between 25 and 100 sccm, power supplied to the plasma between 0 and 350 W, and chamber heights ranging from 6 to 12 cm. The distinctive features of this study include the large number of input parameters studied in a commercial reactor and the accurate predictions obtained from a self-consistent simulation without free parameters. Reducing residence time in the experiments by adjusting chamber height or flow rate produces a more center-fast etch, as expected. The flow simulations were useful in corroborating intuitive arguments and in explaining anomalous results such as the effect of pressure on etch uniformity. More specifically, comparison of simulations and measurements demonstrated the quantitative connection between the Peclet number, the residence time, and the edge uniformity over a large range of process conditions. In addition to explaining general trends with residence time, Peclet number considerations also clarify the differing effects of pressure, flow rate, and chamber height change on uniformity. No attempt was made to impose plasma effects in the flow simulation because measurements of the neutral temperature and dissociation fraction were not available. Plasma power was observed experimentally to slightly improve uniformity without changing the average etch rate.

A zinc-air cell wherein the zinc was present as a bed of particles and the electrolyte circulated by concentration driven natural convection is described. The circulation was from top to bottom within the bed with return channels on either side of the bed. Velocity measurements were made in the channels by laser-Doppler velocimetry and reached a peak of up to 0.9 mm/s (corresponding to a superficial velocity of about 38 gm/s in the bed) early in a constant current discharge. Velocities were satisfactorily predicted by the mathematical model described in Part I. The potential drop across the anode chamber was measured and showed fair agreement with the mathematical model. The model was used to make predictions concerning changes in cell design or operation.) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 132.239.1.231 Downloaded on 2015-06-04 to IP