The reduced-surface-field-type lateral double-diffused MOS (LDMOS) structure, which is the key element used in the power device of the bipolar-CMOS-DMOS (BCD) process, was optimized for a wide voltage range of 20-60 V class in the 0.18 μm BCD process. The on-state resistance (R on ) characteristics to the drain-to-source breakdown voltage (BV dss ) have been improved by optimizing the n-drift conditions and related design rules and the reliable safe operating area (SOA) of the device has also been secured for the 20-30 V class LDMOS device. In order to optimize the 40-60 V class LDMOS device, the n-drift drain buffer and low voltage-threshold voltage for the p-channel device implant were introduced and the reliable SOA was obtained while the excellent R on characteristics showed up to the 60 V class. The final trade-off (R on versus BV dss ) characteristics of the LDMOS fabricated under the newly proposed 0.18 μm BCD process have shown competitive characteristics in the wide voltage range for the various applications.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.