Dynamically reconfigurable metasurfaces promise compact and lightweight spatial light modulation for many applications, including LiDAR, AR/VR, and LiFi systems. Here, we design and computationally investigate high-quality-factor silicon-on-lithium niobate metasurfaces with electrically driven, independent control of its constituent nanobars for full phase tunability with high tuning efficiency. Free-space light couples to guided modes within each nanobar via periodic perturbations, generating quality factors exceeding 30,000 while maintaining a bar spacing of <λ/1.5. We achieve nearly 2π phase variation with an applied bias not exceeding ±25 V, maintaining a reflection efficiency above 91%. Using full-field simulations, we demonstrate a high-angle (51°) switchable beamsplitter with a diffracted efficiency of 93% and an angle-tunable beamsteerer, spanning 18–31°, with up to 86% efficiency, all using the same metasurface device. Our platform provides a foundation for highly efficient wavefront-shaping devices with a wide dynamic tuning range capable of generating nearly any transfer function.

Densely interconnected, nonlinear, and reconfigurable optical networks represent a route to high-performance optical computing, communications, and sensing technologies. Dielectric nanoantennas are promising building blocks for such architectures since they can precisely control optical diffraction. However, they are traditionally limited in their nonlinear and reconfigurable responses owing to their relatively low-quality factor (Q-factor). Here, we highlight new and emerging design strategies to increase the Q-factor while maintaining control of optical diffraction, enabling unprecedented spatial and temporal control of light. We describe how multipolar modes and bound states in the continuum increase Q and show how these high-Q nanoantennas can be cascaded to create almost limitless resonant optical transfer functions. With high-Q nanoantennas, new paradigms in reconfigurable wavefront-shaping, low-noise, multiplexed biosensors and quantum transduction are possible.

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Optical metasurfaces offer unprecedented flexibility in light wave manipulation but suffer weak resonant enhancement. Tackling this problem, we experimentally unveil a new phase gradient metasurface platform made entirely from individually addressable high quality factor (high-Q) silicon meta-atoms. Composed of pairs of nearly identical nanoblocks, these meta-atoms support dipolar-guided-mode resonances that, due to the controlled suppression of radiation loss, serve as highly sensitive phase pixels when placed above a mirror. A key novelty of this platform lies in the vanishingly small structural perturbations needed to produce universal phase fronts. Having fabricated elements with Q-factor ∼380 and spaced by λ/1.2, we achieve strong beam steering, up to 59% efficient, to angles 32.3°, 25.3°, and 20.9°, with variations in nanoantenna volume fractions across the metasurfaces of ≤2.6%, instead of >50% required by traditional versions. Aside from extreme sensitivity, the metasurfaces exhibit near-field intensity enhancement over 1000×. Taken together, these properties represent an exciting prospect for dynamic and nonlinear wave shaping.

As the field matures, its researchers are finding practical applications in solar-energy harvesting, chemical manufacturing, optical refrigeration, and energy-efficient computing.