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The authors have previously developed two types of concatenated electrostatic actuators which are driven by pulse excitation profiles. One of these actuators had excellent performance comparable to that of electromagnetic motors. However, the efficiency of the driving circuit for the actuator was insufficient for practical applications. To improve the efficiency, a new type of electrostatic acluator that can be driven by an ac excitation profile was developed. The new actuator is a linear surface-drive actuator weighing 7g and consisting of a thin slider and a stator. Each element has 3-phase electrodes with the same pitch and 3-phase ac driver connected to the electrodes operate the actuator. A new electrode structure and operation method improve the efficiency by a factor of approximately four. In addition, force and power generation performances are improved. It produces a large power of 1.6W and a propulsive force of 4.4N. The power / weight ratio is improved by a factor of about three, reaching top values of 230Wkg.

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