Dual excitation multiphase electrostatic drive

An electrostatic master–slave mechanism with force enhancement by external inductors for cancellation of self- and parasitic capacitances

“…The approach is to integrate microscopic motor elements in two-and three-dimensional manner, to obtain larger forces that can even be utilized in macroscale applications of centimeter or larger scale. Such an idea was demonstrated by Niino et al in the surface drive type electrostatic film motor named DEMED (dual excitation multi-phase electrostatic drive) [10]. A maximum power-to-weight ratio of 230 W/kg [11] and a thrust force of 310 N [12] was demonstrated with this motor, which shows enough performance to replace electromagnetic motors in macro-scale applications.…”

Next generation actuators leading breakthroughs

“…Both films are made using flexible printed circuit (FPC) technology. In both of them, three-phase parallel electrodes, which are aligned with regular intervals like 200 µm, are fabricated [18,19].…”

A Crawler Climbing Robot Integrating Electroadhesion and Electrostatic Actuation

“…The electrostatic actuators employed in the proposal are generally made of thin electrode films [18][19][20], while electroadhesion usually relies on an electrode film of a similar structure. Therefore, the two force generation mechanisms can share one electrode film, as shown in Figure 1.…”