No abstract

We demonstrate a new hybrid-soft-lithography micromolding process that results in a mechanically-compliant, magnetically actuated membrane. The new microactuator consists of a thin undoped polydimethylsiloxane (PDMS) membrane with a central magnet feature, which is also micromolded using soft lithography. The central magnet is composed of a magnetic nanocomposite polymer (M-NCP) material, which is achieved by uniformly dispersing rare earth magnetic powder (MQP-12-5) in the PDMS polymer matrix. The hybrid fabrication technique is capable of realizing a highly flexible membrane with the ability of providing bidirectional deflection without sacrificing the transparency of the device, which may be required for many biomedical applications. Furthermore, we show that the hybrid process also yields improved deflection of the membrane using lower magnetic fields than an opaque membrane fabricated entirely in nanocomposite polymer. These lower fields are more suitable to on-chip production of microactuators excited via electronic signals in microcoils.

No abstract