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Traditional TCAD simulation has succeeded in predicting and optimizing the device performance; however, it still faces a massive challenge -a high computational cost. There have been many attempts to replace TCAD with deep learning, but it has not yet been completely replaced. This paper presents a novel algorithm restructuring the traditional TCAD system. The proposed algorithmpredicts three-dimensional (3-D) TCAD simulation in real-time while capturing a variance, enables deep learning and TCAD to complement each other, and fully resolves convergence errors.

TCAD simulation has incessantly solved many complex problems, but it becomes demanding that alternatives be found because TCAD simulation cannot provide the precise and fast prediction in the nano-scale era. With the success story on deep learning in research area, many big data companies have attempted to introduce deep learning to support or replace TCAD simulation. The reason is deep learning models has great potential that solves the problems of the TCAD simulation in terms of execution time, coverage. This paper aims to describe various scenarios of deep learning applicable to TCAD. We firstly describe an application that supplies TCAD data to the deep learning model although TCAD simulation is not calibrated. We then review various approaches that mimic TCAD simulation itself. We finally introduce an application that deep learning model automatically calibrates TCAD models to the measurement without experts. In each scenario, we review the related papers and compare pros and cons.