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Advanced polymer science and design technologies are constantly evolving to meet ever-growing expectations for flexible optical MEMS. In this work, we present design and microfabrication considerations for designed flexible Polymeric Opto-Electro-Mechanical Systems (POEMS). The presented methods integrate waveguide fabrication and laser diode (LD) chip assembly with Lawrence Livermore National Laboratory's (LLNL's) flexible thin-film technology to enable LLNL's first neural optoelectrode that can deliver guided light for neural activation. We support our findings with electrical and optical bench verification tests, present thermal simulation models to analyze heat dissipation of laser light sources on polymer substrates and discuss potential modifications for next generation prototypes. This fully integrated approach will allow spatial precision, scalability and more particularly, longer lifetime, needed to enable chronic studies of brain activities.

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