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This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a −3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be −95.27 ppm/°C and 57.5 ppb/°C2 for resonant mode A, and −95.43 ppm/°C and 55.8 ppb/°C2 for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (kt2) were extracted and are reported. Device Q decreased to 334 and total kt2 increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.

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Accurately sensing AC magnetic field signatures poses a series of challenges to commonly used Hall-effect sensors. In particular, induced voltage and lack of high-frequency spinning methods are bottlenecks in the measurement of AC magnetic fields. We describe a magnetic field measurement technique that can be implemented in two ways: 1) the current driving the Hall-effect sensor is oscillating at the same frequency as the magnetic field, and the signal is measured at the second harmonic of the magnetic field frequency, and 2) the frequency of the driving current is preset, and the measured frequency is the magnetic field frequency plus the frequency of the current. This method has potential advantages over traditional means of measuring AC magnetic fields used in power systems (e.g., motors, inverters), as it can reduce the components needed (subsequently reducing the overall cost and size) and is not frequency bandwidth limited by current spinning. The sensing technique produces no induced voltage and results in a low offset, thus preserving accuracy and precision in measurements. Experimentally, we have shown offset voltage values between 8 and 27 μT at frequencies ranging from 100 Hz to 1 kHz, validating the potential of this technique in both cases.

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