In this paper, a closed-form expression for the pull-in voltage of fixed–fixed beams and fixed–free beams is derived starting from the known expression of a simple lumped spring-mass system. The effects of partial electrode configuration, of axial stress, non-linear stiffening, charge re-distribution and fringing fields are all included in the final expression. Further, the results obtained are summarized and validated with other existing empirical and analytical models as well as with finite element simulation results. The model agrees well with finite element simulation results obtained with COVENTORWARE software.

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In this paper, a surface micromachined microwave tunable low pass filter, consisting of tunable shunt capacitors and series inductors, has been realized. The filter exhibits insertion loss of less than 1 dB (up to 10 GHz), stop band attenuation of 20 dB at 20 GHz, and cutoff frequency is changed to 8 GHz with the application of DC actuation voltage in the structure. The filter has an overall dimension of 5.5 mm × 2 mm. The characteristics of tunable filter are investigated with and without packaging.

Email:sghantam@serc.iisc.ernet.in, Phone: 0091 80 23600654, extn:3 14. AbstractIn this contribution, the transient characteristics of Benzo Cyclo Butene (BCB) encapsulated Aluminum (AI) micro mechanical resonators as a function of time varying pressure are studied. The quality factor of encapsulated AI resonator showed a drastic change with time of mowthan 200% reduction. The estimated transient leak rate spans over several orders of magnitude to 10~9 atm cm3 s-'). A theoretical description of AI micro mechanical resonator and the leak rate are presented. Possible causes for the leak rate and the potential solutions are also outlined.