Silicon thin film was successfully deposited on glass substrate using Radio frequency (RF) magnetron sputtering. The effect of deposition pressure on the physical and structural properties of thin films on the glass substrate was studied. The film thickness and deposition rate decreased with decreasing deposition pressure. Field emission scanning electron microscopy (FESEM) shows as the deposition pressure increased, the surface morphology transform from concise structured to not closely pack on the surface. Raman spectroscopy result showed that the peak was around 508 cm-1, showing that the thin film is nanocrystalline instead of polycrystalline silicon.
This paper described about design, fabrication and characterization of conductivity sensor using printed circuit board (PCB). The main objective is to sense the conductivity of aqua agriculture. A sensor was design by using interdigital capacitor concept where the term interdigital refers to pattern of fingers that is resembled by the shape and relative position of the electrodes. This sensor was fabricated by using PCB in order to minimize the cost than the existing conductivity sensor. Sensor performance was characterized by various test setups to check ability and accuracy of the sensor. From the result, it shown that the sensor has very good sensitivity with correlation coefficient R 2 of 0.969.
Nanocrystalline silicon (nc-Si) thin films were deposited on glass and polytetrafluoroethylene (PTFE, teflon) substrates using Radio frequency (RF) magnetron sputtering. The effect of RF power and deposition temperature on the physical and structural properties of nc-Si on the glass and Teflon substrate was studied. The thin films properties were examined by Raman spectroscopy and field emission scanning electron microscopy (FESEM). We found that the thickness of thin films increased with increased RF power and deposition temperature. Raman spectroscopy results it showed that, with increasing RF power and deposition temperature can cause the changing of crystallinity on both glass and Teflon substrate.
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