This paper applies a newly developed mechatronic inerter network to suppress vibrations of a full optical table. Optical tables are normally applied to insulate precision machines from two types of disturbances: ground disturbances from the environment and load disturbances from the equipment. These two disturbances can be independently controlled by disturbance response decoupling (DRD) techniques. For example, we can isolate the ground disturbances by soft passive suspensions and improve the load responses by active control. However, the passive elements cannot be easily adjusted according to the operating conditions. Therefore, this paper applies mechatronic inerter networks to a full optical table, and optimizes the ground responses by connecting the networks to suitable electric circuits. We then apply DRD techniques to improve the load responses without influencing the ground responses. The designed mechatronic inerter networks and active controllers are implemented to a full optical table for experimental verification. Based on the results, the proposed mechatronic inerter networks and DRD structures are deemed effective in improving system responses.

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This paper proposes the use of inverse disturbance response decoupling (DRD) for an optical table to suppress vibration in precision machinery. Optical tables are normally adopted in precision engineering to repress two vibration sources: ground disturbances from the environment and load disturbances from machines. The suspension settings for restraining these disturbances are conflicting; therefore, in previous studies, we developed a DRD structure that could independently control the disturbance responses: using soft passive elements to isolate the ground disturbances and improving the load responses by active control. This paper extends these ideas by proposing an inverse DRD structure that uses stiff passive elements to suppress load disturbances and improve ground responses by active control employing robust loop shaping techniques. The designed inverse DRD structure and controllers are implemented and verified by experiments. Based on the results, the proposed inverse DRD structure and robust control are deemed effective in improving the performance of an optical table.