Improvement technologies for antireflection property of transparent plastic substrates are required in computer displays. Inorganic coatings have been used to reduce the surface reflection. We have already reported that fluorocarbon thin films sputtered with a poly(tetrafluoroethylene) (PTFE) target are transparent and can be used for an antireflection film, although the pristine PTFE plate used for the sputtering target is white. The fluorocarbon thin films were deposited onto a polyester (PET) film substrate by an rf sputtering, and characterized their optical properties. Elemental ratio, fluorine for carbon, of the thin films increased and degree of cross-linking of the thin films decreased with an increase of the rf power. Arithmetical surface roughness of the fluorocarbon thin films slightly increased with an increase of the rf power. Surface roughness of the fluorocarbon thin film affects the transmittance as well as the chemical structure of the thin film. To enhance the transparency, the diffuse transmittance should be suppressed, and flat surface thin films should be prepared by the sputtering at lower rf power and pressure.

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