Effects of copper interfacial layer on surface characteristics, adhesion and wear durability of fluorocarbon thin film sputtered onto polyimide film substrate

Seino, Shou; Sasaki, Shunsuke; Owashi, Tatsuki; Oya, Kei; Iwamori, Satoru

doi:10.1016/j.vacuum.2014.10.001

Cited by 4 publications

(1 citation statement)

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“…There have been lots of studies on the coating of fluorocarbon films by using magnetron sputtering to achieve various properties [10][11][12][13][14][15]. Nevertheless, since the properties of the deposited films are greatly affected by the sputtering conditions, e.g., sputtering power, sputtering time, vacuum pressure, substrate temperature, gas flowing rate and other factors [16][17][18], it is of significance to investigate the relationship between the sputtering conditions and the properties of the films coated on the textiles directly.…”

Section: Introductionmentioning

confidence: 99%

Preparation and Characterization of FC Films Coated on PET Substrates by RF Magnetron Sputtering

Huang

2018

MATEC Web Conf.

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Abstract. Fluorocarbon (FC) films were prepared on polyethylene terephthalate (PET) plates and PET fabrics respectively by a radiofrequency (RF) magnetron sputtering technique using polytetrafluoroethylene (PTFE) as a target. Scanning electron microscope and X-ray photoelectron spectroscopy were used to investigate the morphology, structure and composition of the obtained FC films. The hydrophobicity and uvioresistant properties of the FC film coated fabric were studied. The results show that the FC films were successfully deposited on the PET substrates by a RF magnetron sputtering. The deposited films are made up of four components -CF3, -CF2-, CF-and -C-. The proportions of the four components and surface morphologies of the deposited films vary with the sputtering conditions. Compared with the original fabric samples, the hydrophobicity of the FC film coated fabrics is quite good and improved significantly.

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