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The China Earthquake Administration established a network for intensity rapid report and earthquake early warning (IRREEW) in 2016–2020, which consists of approximately 5000 conventional strong-motion and approximately 10,000 low-cost micro-electro-mechanical system (MEMS) seismometers. These seismographs, particularly MEMS stations, can provide a large amount of near-field waveform data suitable for rapid source inversion. Compared with conventional strong-motion data, MEMS recordings have rarely been used in the previous source inversions, because the MEMS technology is newly applied in earthquake monitoring, and the seismograph has a relatively lower signal-to-noise ratio and more severe baseline shifts. However, from waveform comparisons at collocated MEMS and strong-motion stations, we find that they are highly consistent with each other, particularly at frequencies above 0.04 Hz. To explore the application prospect of MEMS data to source inversion, we inverted both MEMS and strong-motion data for three strong earthquakes recorded by the IRREEW network during 2021–2022 to determine their rupture processes. In applications to the 2021 Mw 6.1 Yangbi earthquake, the 2022 Mw 6.6 Menyuan earthquake, and the 2022 Mw 6.6 Luding earthquake, the MEMS data equally well constrain the rupture model. The resulting source information, including the moment magnitude, rupture direction, and rupture dimension, are consistent with those obtained from the strong-motion inversions. Because the low-cost MEMS instruments can be deployed densely around seismically active regions, they can provide urgent waveform data for rapid determination of rupture process, which is crucial for simulation of strong ground motions, and assessments of earthquake and related disasters.

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