The application of microbeams is providing new insights into the actions of radiation at the cell and tissue levels. So far, this has been achieved exclusively through the use of collimated charged particles. One alternative is to use ultrasoft X rays, focused by X-ray diffractive optics. We have developed a unique facility that uses 0.2-0.8-mm-diameter zone plates to focus ultrasoft X rays to a beam of less than 1 microm diameter. The zone plate images characteristic K-shell X rays of carbon or aluminum, generated by focusing a beam of 5-10 keV electrons onto the appropriate target. By reflecting the X rays off a grazing-incidence mirror, the contaminating bremsstrahlung radiation is reduced to 2%. The focused X rays are then aimed at selected subcellular targets using rapid automated cell-finding and alignment procedures; up to 3000 cells per hour can be irradiated individually using this arrangement.

Broadband extreme ultraviolet molybdenum/yttrium aperiodic multilayer analyzers were designed for polarization experiments in 8.5-11.7 nm wavelength range. The multilayer analyzers were made using direct current magnetron sputtering and characterized using the soft x-ray polarimeter at BESSY-II facility. Measured s reflectivities at the Brewster angle are 5.5% for a multilayer designed for 8.5-10.1 nm wavelength range and 6.1% for one designed for 9.1-11.7 nm. The multilayers also exhibit high polarization degree up to 98.79%. In addition, the multilayer was also measured over 38°-52°angular range at the fixed wavelength of 10.2 nm and the mean s reflectivity is 6.2%.

Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5nm, and the corresponding s-component transmission (Ts) decreased from 6% to 2% with increasing wavelength.

Nonperiodic molybdenum/silicon broadband multilayer polarizers have been designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. Their performances have been characterized using the high precision eight-axis soft x-ray polarimeter at the BESSY facility. Different multilayers have measured s-polarized reflectivities of 27% at 13.1nm and higher than 15% over the wavelength range of 13–19nm. Nearly constant s reflectivity, up to 37%, is observed over the 15–17nm wavelength range, where the degree of polarization is more than 98%. Furthermore, these multilayer polarizers also show high s reflectivity and polarization over a broad angular range at fixed wavelength.

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