Coronavirus disease 2019 (COVID-19) is a mild to moderate respiratory illness in most children and adolescents, but a small proportion develop severe or critical illness. Although pediatric clinical trials for the treatment of COVID-19 are sparse, there are some available drugs for children and adolescents with severe COVID-19. This review summarizes clinical data focusing on antiviral agents and immunomodulators for COVID-19 treatment.Additionally, the current recommendations for therapeutics for children and adolescents with COVID-19 are discussed. Remdesivir is suggested for pediatric patients with COVID-19 in the following cases: children and adolescents with severe COVID-19 who need supplemental oxygen without mechanical ventilation; adolescents aged ≥12 years and weight of at least 40 kg with COVID-19 who do not require supplemental oxygen and are within 7 days of symptom onset and are at high risk of progression to severe illness. Nirmatrelvir/ritonavir is considered for adolescents aged ≥12 years and weighing at least 40 kg who do not require supplemental oxygen and are within 5 days of symptom onset and are at high risk of progression to severe disease. Corticosteroids are not recommended in children and adolescents with mild to moderate COVID-19. Corticosteroids are recommended in children and adolescents with severe to critical COVID-19.

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The on-chip variation (OCV) should be critically controlled to obtain the high speed performance in logic devices. The variation from proximity dominantly contributes to OCV. This proximity effect can be compensated by applying welltreated optical proximity correction (OPC). Therefore, the accuracy of OPC is needed, and methods to enhance its result have to be devised. The optical proximity behaviors are severely varied according to the material and optical conditions. In point of material, the proximity property is affected by species of photo-resist (PR) and change of post exposure bake (PEB) conditions. 3σ values of proximity variation are changed from 9.3 nm to 15.2 nm according to PR species. Also, proximity variations change from 16.2 nm to 13.8 nm is observed according to PEB condition. Proximity variations changes of 11.6 nm and 15.2 nm are measured by changing the illumination condition. In order not to seriously deteriorate OPC, these factors should be fixed after the OPC rules are extracted. Proximity variations of 11.4 nm, 13.9 nm and 15.2 nm are observed for the mask mean-to-targets (MTT) of 0 nm, 2nm, and 4nm, respectively. The decrease the OPC grid size enhances the correction resolution and the OCV is reduced. The selective bias rule is generated by model using grid size of 1 nm and 0.5 nm. For the nominal CD of 87 nm, proximity variations are measured to be 14.6 nm and 11.4 nm for 1 nm and 0.5 nm grid sizes, respectively. The enhancement amount of proximity variations are 9.2 nm corresponding to 39% improvement. The CD uniformity improvement for adopting the small grid size is confirmed by measuring the CD uniformity on real SRAM pattern. CD uniformities are measured 11nm and 9.1nm for grid size of 1 nm and 0.5 nm, respectively. 22% improvement of the CD uniformity is achieved.

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