Photoemission-induced atmospheric-pressure DC gas discharge was successfully generated using a 9 nm gold thin film deposited on quartz glass as a photocathode which back-illuminated with UV light at wavelengths of 172 nm (Xe excimer lamp), 254 nm (Hg lamp), 265 nm (Deep UV LED). A stable discharge current more than 30 μA at 1450 V in Ar and 50 μA at 4000 V in air was achieved by using 172 nm while it was limited by power densities and quantum efficiencies of other UV sources. The optical emission spectroscopy showed emissions from excited species in both Ar and air plasma.
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