The swarm parameter has been calculated as a function of the amount of NF3 in Ar, He and N2 using the two-term Boltzmann equation. In particular, the attachment coefficient and attachment rate coefficient in NF3 are compared with the experimental values measured by Lakdawala et al. The large discrepancies between the measured and calculated values of the attachment rate coefficient for NF3 mixture in Ar, which were pointed out by Lakdawala et al., are discussed.

A compact linear electron transmission apparatus was used for the measurement of the total electron scattering cross section at 4-500 eV. Total cross sections of chlorofluorocarbon (CCl 2 F 2 ), hydrochlorofluorocarbon (CHClF 2 ), perfluoropropane (C 3 F 8 ), perfluoro-n-pentane (C 5 F 12 ), perfluoro-n-hexane (C 6 F 14 ) and perfluoro-n-octane (C 8 F 18 ) were obtained experimentally and compared with the values obtained from a theoretical calculation and semi-empirical model calculation.

The zero field reduced mobilities of electrons μ0 in helium, neon, argon, krypton, and xenon have been calculated as a function of gas temperatures T using the Boltzmann equation and compared with the values of the thermal electron mobilities of electrons μN obtained by Mozumder [J. Chem. Phys. 72, 6289 (1980)]. Discussion has been made about the large discrepancies between the measured and calculated values of μN in neon which were pointed out by Mozumder. The calculated exact drift velocities W in helium as a function of E/N and T have been compared with the experimental results of W for wide E/N and T ranges. A summarized figure is shown for anomalous electron mobilities in helium as a function of N at low E/N.

Previous theoretical studies assumed that the energy loss of a colliding electron has a discrete value for dissociative excitation of molecular oxygen. In the calculation of the rate coefficients for oxygen atom yields using the Boltzmann equation, the previous reports have used discrete energy loss values of 6.1 eV for A3Σ+u and 8.4 eV for B3Σ−u. In this paper, we take account of the fact that the excitation to B3Σ−u has a continuum energy loss spectrum and describe the effects on calculated swarm parameters that are important in the simulation of ozonizer discharges. It can be seen that the use of a continuum electron energy-loss spectrum as opposed to a discrete electron energy loss associated with excitation to the B3Σ−u state makes no significant difference in the calculated values of electron swarm parameters in oxygen. We also calculate the ozone yield as a function of E/N obtained from the analysis of the energy balance equation. In this case, the partial cross section for dissociation via B3Σ−u assuming a continuum electron energy-loss spectrum can have significant effects on the atomic oxygen yields at different E/N.

For times greater than the electron transit time, a suitable statistical theory of the total number of electrons in avalanches is presented, and compared with the results simulated by a Monte Carlo method.